管式低壓磷擴設備

設備名稱 Equipment name

管式低壓磷擴設備  Horizontal Low Pressure Phosphorus Diffusion Equipment

設備型號 Equipment Model

DOA-400/DOA-400L

設備用途 Equipment Application

低壓磷擴散摻雜。
Low pressure phosphorus diffusion & doping.

技術特點  Features 

1、高方阻技術解決方案。
Technical solutions for high sheet resistance.

2、獨特雙嵌套爐門結構，有效解決爐口偏磷酸問題。
Unique double-layer-nested furnace door structure,free from metaphosphoric acid problem at the urnace mouth effectively.

3、獨特溫區設置，有效解決爐口爐尾方阻均勻性。
Unique temperature zone setting which guarantees the uniformity of sheet resistance at the furnace mouth and end effectively.

4、高速平穩整體模組推舟機構。
High-speed and stable integral module boat pushing mechanism.

5、智能化全自動控制。
Intelligent automatic control.

6、自主知識產權MES軟件。
MES software with independent intellectual property rights.

7、匹配S.C智能化生產管理系統。

Matching S.C smart production management system.

設備參數  Parameters